Choi, Jongsoo (University of Michigan), Rhee, Choong-Ho (University of Michigan, Ann Arbor), Qiu, Zhen (University of Michigan), Wang, Thomas (University of Michigan), Oldham, Kenn (University of Michigan)

Static and Dynamic Modeling of a Multi-Axis Thin-Film Piezoelectric Micro-Actuator

Scheduled for presentation during the Contributed session "Piezoelectric Actuation and Nanoscale Control" (WeAT3), Wednesday, October 23, 2013, 11:55−12:15, Tent A

6th Annual Dynamic Systems and Control Conference, October 21-23, 2020, Stanford University, Munger Center, Palo Alto, CA

This information is tentative and subject to change. Compiled on April 20, 2024

Abstract

Multi-axis (z, θx, θy) micro-actuators based on thin-film lead-zirconate-titanate (PZT) for use in dual axes confocal microscopy are presented with their static and dynamic models. Prototype actuators have achieved as much as 430 μm of vertical displacement and ±10º of mechanical tilting angles in both θx and θy directions in a footprint of 3.2×3.2 mm. The experimental static displacements and transient response of the actuator were used to identify residual stresses in the thin films, dimensional variance due to fabrication limitation, and damping coefficients in the model. With the identified parameters, the model predicts the static displacements of the four corners of the stage with an average absolute error of 17.4 μm over five different voltage levels and shows a reasonable agreement with the experimentally measured transient dynamic data. These results will be used to develop closed-loop controller for the system.